Work

French Research in Nanoimprint: processes, applications, players

Year: 2025

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Chevalier, C., Gourgon, C.

Institutions: Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7124232558

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