Work

Subsurface mechanical damage of fused silica glass during grinding by various sub-aperture tools with and without ultrasonics

Year: 2026

Type: article

Source: Applied Optics

DOI: 10.1364/ao.580426

Authors: T. Suratwala, W. Steele, G. Tham, J. Ross, J. Johnson, O. Herrera, M. Cahill, D. Bechtold, M. Bechtold, R. Bechtold, F. Ravizza

Institutions: Lawrence Livermore National Laboratory, OptiPro Systems (United States)

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Energy, Laboratory Directed Research and Development

Awards: G14554683, G3017762414, G3390984726

OpenAlex ID: W7124258156

FWCI: 1.789

Cites: 20

Cited by: 1

Related to: