Modeling insights into amorphous carbon etching by SO2/O2 low-pressure plasma
Year: 2026
Type: article
DOI: 10.1116/6.0005172
Authors: Dmitry Levko, Mingmei Wang
Institution: Lam Research (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7124320068