Work

Similarity scaling for low-pressure capacitive radio-frequency CF 4 plasmas across operation modes

Year: 2026

Type: article

Source: Physical review. E

DOI: 10.1103/7z84-ccpw

Authors: Zhenhua Zhou, Xiaokun Wang, Hanyang Li, Julian Schulze, Peter Hartmann, Zoltán Donkó, Yongxin Liu, Yangyang Fu

Institutions: Tsinghua University, Ruhr University Bochum, HUN-REN Wigner Research Centre for Physics, Dalian University of Technology, Tsinghua Sichuan Energy Internet Research Institute

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Deutsche Forschungsgemeinschaft, National Natural Science Foundation of China, Tsinghua University

Awards: G2200177098, G275343208, G5948891258

OpenAlex ID: W7124465345

FWCI: 3.411

Cites: 57

Cited by: 2

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