In-Sensor Computing with Contactless MEMS: Binary Neurons for Harsh Environment
Year: 2025
Type: conference-paper
Abstract: In-sensor computing remains limited in harsh environments due to the thermal and radiation sensitivity of conventional electronics. While MEMS microrelays enable high-temperature operation, their reliability is insufficient for the switching rates required by computing tasks. This work presents the first contactless MEMS-based binary neuron that performs weighted summation and thresholding within a single device. Based on electrostatic actuation and a tunable capacitive divider, neurons communicate electrically without any CMOS circuitry. Experimental validation demonstrates stable operation up to 723 K and under 40 MeV irradiation, with functionality up to 10 kHz and a compact$0.3 \text{mm}^{2}$footprint. This approach paves the way for scalable, robust neuromorphic processing for vibration pattern recognition, enabling seamless integration into MEMS sensor platforms for extreme-environment deployment.
Institutions: Centre National de la Recherche Scientifique, Laboratoire d'Analyse et d'Architecture des Systèmes, Université Gustave Eiffel, Laboratoire d'électronique, systèmes de communication et microsystèmes, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information, Université Grenoble Alpes
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7124853708