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Multimodal optical microscopy defect detection method for indium bump arrays based on multi‐scale Demons deformation field difference

Year: 2026

Type: article

Source: Journal of Microscopy

DOI: 10.1111/jmi.70061

Authors: Yifei Li, Ziyi Wang, Yong Li, Chenguang Liu, Jian Liu, Xu Hu, Xiaoyu You

Institutions: Harbin Institute of Technology, Kunming Institute of Physics

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G6261213149, G6830160500

OpenAlex ID: W7124945544

FWCI:

Cites: 14

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