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Feedthrough Compensation for Force-Feedback Controlled Piezoelectric MEMS Microphones

Year: 2025

Type: conference-paper

Source: Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...

DOI: 10.1109/sensors59705.2025.11330565

Authors: Til Friebe, Nikita Ovsiannikov, Maximilian Lenz, Christian Bretthauer, Gabriele Schrag

Institutions: Technical University of Munich, Infineon Technologies (Germany)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7125145690

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Cites: 5

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