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A Hybrid Piezoelectric–Capacitive MEMS Microphone With Peripheral Electrostatic Transduction

Year: 2026

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2026.3650885

Authors: Yangyang Guan, Chen Wang, Hemin Zhang, Sina Sadeghpour, Milad Shojaeian, Chengxin Li, Christ Glorieux, Michael Kraft

Institutions: KU Leuven, Northwestern Polytechnical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: China Scholarship Council

Award: G4826103839

OpenAlex ID: W7125481141

FWCI:

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