Year: 2026
Type: article
Abstract: In order to explore the effect of stress on the damage of 4H-SiC materials, this paper employed single abrasive grain indentation simulation based on the Smoothed-Particle Hydrodynamics (SPH) method, and verified the accuracy of the indentation model through an indentation experiment on a single abrasive grain. The research examined the consequences of varying pressures on the processing of 4H-SiC, including parameters such as the depth of abrasive grain penetration, the stress-affected region, and the initiation and propagation of cracks. Subsequently, mathematical models were developed to characterize stress variations under different pressure conditions. The findings reveal several vital insights: First, a discernible linear relationship exists between the depth of abrasive grain penetration into 4H-SiC and the applied pressure. Second, within a specific pressure range, the stress-affected zone within the workpiece enlarges as the applied pressure increases. However, when cracks form within the workpiece, the dimensions of the stress-affected zone exhibit fluctuations. During the abrasive grain indentation phase, a discernible pattern emerges in the stress distribution within the workpiece.
Source: Micromachines
DOI: 10.3390/mi17010138
Authors: Wenshan Wang, Shuixing Lin, Yiqing Yu, Nian Duan
Institution: Huaqiao University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,534
Awards: G4880330343, G6621911052, G6939081568
OpenAlex ID: W7125517862