Broadband Impedance Response Extraction of On-Chip Interdigital Capacitors using a 3-D DSA Operator for Piecewise Homogeneous Structures
Year: 2025
Type: conference-paper
Abstract: In this contribution, an enhanced 3-D differential surface admittance operator is proposed, facilitating accurate modeling of piecewise homogeneous cuboidal objects. By exploiting the analytical properties of entire-domain basis functions, material interfaces are effectively eliminated from the formulation, leading to a reduction in the number of unknowns without compromising the accuracy of the operator. After a validation of the novel approach, its effectiveness is demonstrated through the analysis of the impedance responses of on-chip interdigital capacitor structures.
Institutions: Ghent University, IMEC
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7125592476