Work

Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration

Year: 2025

Type: review

Source: Winter Simulation Conference

DOI: 10.1109/wsc68292.2025.11338987

Authors: Claude Yugma, Adrien Wartelle, Stéphane Dauzère-Pérès, Pascal Robert, Renaud Roussel, Jasper van Heugten, Taki-Eddine Korabi

Institutions: Université Clermont Auvergne, STMicroelectronics (France)

Language: English

Topic: Digital Transformation in Industry

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W7125615566

FWCI:

Cites: 20

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