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Nanopatterning Approach for Multiple-Height Metasurfaces with Absolute Lateral Spatial Precision

Year: 2026

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.5c21332

Authors: Eugene J. H. Soh, T. Thu Ha Do, Chee Leng Lay, Ronghui Lin, Vytautas Valuckas, Son Tung Ha

Institutions: Agency for Science, Technology and Research, Institute of Materials Research and Engineering

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: Agency for Science, Technology and Research, National Research Foundation Singapore

Awards: G1571103769, G3287889319, G4921346969

OpenAlex ID: W7125980352

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Cites: 37

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