Work

Understanding and mitigating oxidation-induced electrical instability in sputtered Sc thin films

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004952

Authors: Jeonho Kim, Indira Kiladze, Clement Porret, Bert Pollefliet, Johan Swerts

Institution: IMEC

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7126026226

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Cites: 15

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