Year: 2026
Type: editorial
Abstract: Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...].
Source: Micromachines
DOI: 10.3390/mi17020205
Authors: Zhi-Xuan Dai, Takahito Ono, Ching-Liang Dai
Institutions: National Chung Hsing University, Tohoku University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,534
OpenAlex ID: W7127129594