Work

High-speed performance UV-C detectors based on atomic layer deposited gallium oxide thin films

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0005140

Authors: Aleksei Almaev, Pavel Yunin, Alexander Tsymbalov, Oleg Khrykin, Ekaterina Arkhipova, Stanislav Kraev, Mikhail Drozdov, Maria Zorina, Bogdan Kushnarev, Dmitry Korolev, Leonid Mochalov, Ekaterina Slapovskaya

Institutions: National Research Tomsk State University, Institute for Physics of Microstructures, N. I. Lobachevsky State University of Nizhny Novgorod, University of North Carolina at Charlotte

Language: English

Topic: Ga2O3 and related materials

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Russian Science Foundation

Award: G3399837652

OpenAlex ID: W7128089695

FWCI:

Cites: 42

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