Work

Measurement of a high-density grating period based on a prism-grating interferometer

Year: 2026

Type: article

Source: Applied Optics

DOI: 10.1364/ao.585239

Authors: Huan Wang, Chunlong Wei, Xiangwen Ning, Wei Jia, Changhe Zhou

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Guangdong Provincial Pearl River Talents Program, Guangzhou Municipal Science and Technology Project, Basic and Applied Basic Research Foundation of Guangdong Province

Awards: G1028977592, G4891634171, G5368094629, G6518493732, G6518775242, G7993427062

OpenAlex ID: W7128447436

FWCI: 2.01

Cites: 26

Cited by: 1

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