Multi-scale simulation and flow field characteristics of polishing pad groove structures
Year: 2026
Type: article
Source: Physics of Fluids
DOI: 10.1063/5.0312258
Authors: Lifei Zhang, Nanhao Zhao, Hui Ci, Ke Wang, Xinchun Lu
Institutions: State Key Laboratory of Tribology, Tsinghua University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6583086836
OpenAlex ID: W7128483548