Work

Synchronous Multifunctional Combinatorial Chemistry on a Molecular Glass Backbone─a Strategy for Developing Photoresists with Improved Lithography Performances

Year: 2026

Type: article

Source: Chemistry of Materials

DOI: 10.1021/acs.chemmater.5c03001

Authors: Yu Yan, Chenfei Zhao, Jingwen Hui, Xinfu Zhang, Xinfu Zhang, Xue Zhang, Xue Zhang, Yifeng Peng, Pengzhong Chen, Xiaojun Peng, Yi Xiao

Institutions: Dalian University of Technology, State Key Laboratory of Fine Chemicals

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Fundamental Research Funds for the Central Universities

Awards: G1107351959, G1242261007, G3162813072, G3268423875, G5314665613, G6986969488, G8969500842

OpenAlex ID: W7128493078

FWCI:

Cites: 35

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