Work

A Review: Laser Annealing of Active SiC and Its Applications

Year: 2026

Type: article

Source: ACS Applied Electronic Materials

DOI: 10.1021/acsaelm.5c02406

Authors: Nelofur Rasheed, Jing Xu, Jianhong Liu, Muhammad Faizan, Jun Luo

Institutions: Chinese Academy of Sciences, Institute of Microelectronics, University of Chinese Academy of Sciences

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7128693829

FWCI: 5.032

Cites: 118

Cited by: 3

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