Work

Ultrathin Microlens Arrays for Dynamic Beam Shaping Based on 3D Lithography

Year: 2026

Type: article

Abstract: Conventional microlens arrays (MLAs) are often constrained by their static focal properties, which limit post-fabrication adaptability in dynamic optical systems. To address this, we demonstrate a tunable beam shaper capable of real-time spot-size modulation by introducing an adjustable axial displacement between a primary lens and an MLA. A critical advancement of this work is the fabrication of ultra-thin MLAs featuring an exceptionally low aspect ratio (1:187.5) and continuous surface profiles. Through optimizing 3D lithography and ion beam etching (IBE) workflows, we achieved an optical-grade surface finish with a roughness (Sa) of 3 nm. This high-fidelity, low-profile component enables efficient beam homogenization with reconfigurable working distances and spot dimensions. The proposed architecture provides a versatile and robust solution for advanced laser material processing, bridging the gap between static beam shaping and dynamic laser delivery.

Source: Micromachines

DOI: 10.3390/mi17020250

Authors: Ruiqi Cheng, Yue Zhang, Shuo Chen, Yu Shu, Hao Cao, Chengqun Gui

Institution: Wuhan University

Language: English

Topic: Advanced optical system design

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,534

Funder: National Natural Science Foundation of China