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Direct extraction of surface vibration profiles with optical beam deflection

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Year: 2026
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/5.0279596
Authors: Thomas J. Pollei, Adam W. Behnke, Kevin J. Webb
Institution: Purdue University West Lafayette
Language: English

Topic: Advanced MEMS and NEMS Technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Defense Advanced Research Projects Agency, Air Force Office of Scientific Research, Army Research Office
Awards: G2713744592, Multifunctional Optomechanics with Structured Material, G4196626845, G5317731560
OpenAlex ID: W7129756310
FWCI: 1.766
Cites: 32
Cited by: 1
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