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Comparative study on the formation of Cr and Ti ohmic contacts to (001) β -Ga2O3

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Year: 2026
Type: article
Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
DOI: 10.1116/6.0005214
Authors: Carlo A. Schettini Mejía, Kim Kisslinger, Isabella Williams, Xipin Chen, Judith C. Yang, Lisa M. Porter
Institutions: Carnegie Mellon University, Brookhaven National Laboratory, Center for Functional Nanomaterials
Language: English

Topic: Ga2O3 and related materials
Subfield: Electronic, Optical and Magnetic Materials
Field: Materials Science
Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Carnegie Mellon University, Brookhaven National Laboratory
Awards: G3262563802, G3619635233, Epitaxial Film Growth and Characterization of Stable and Metastable Gallium-Aluminum-Oxide Polymorphs
OpenAlex ID: W7130385123
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Cites: 28
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