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Quantitative scanning capacitance microscopy enabled by machine learning and electrostatic modeling

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005148

Authors: Sheng-Zhu Ho, Si-An Wen, Yi-Chun Chen, Dong Gui, Wei-Shan Hu

Institutions: National Cheng Kung University, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science and Technology Council, Taiwan Semiconductor Manufacturing Company

OpenAlex ID: W7130389345

FWCI: 1.766

Cites: 33

Cited by: 1

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