AlN-on-sapphire microdisk resonators for precise on-chip temperature sensing
Year: 2026
Type: article
Abstract: Photonic integrated circuit sensors can be used for precise sensing of the environment, offering the advantage of integration with fiber networks for remote and multiplexed sensor arrays. In this work, we examine the performance of aluminum nitride on sapphire microdisk mode resonators in an all-pass configuration. We discuss their potential as on-chip temperature sensors under fixed-frequency and frequency-scanning modes, demonstrating the latter can measure a 1 K temperature change with an uncertainty of ±5.1 mK over a temperature range of 25–55 °C.
Source: Journal of Applied Physics
DOI: 10.1063/5.0313161
Institution: Cardiff University
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,500
OpenAlex ID: W7130512313