Work

Introducing thermal scanning probe lithography into the nanofabrication of semiconductor quantum devices

Year: 2026

Type: conference-paper

Source: SPIE Novel Patterning Technologies

DOI: 10.1117/12.3089813

Authors: Iker Uranga-Granados, Robin Erne, Jana Chaaban, Marta Fernandez-Regulez, Joan Bausells, Guido Rademaker, Emine Cagin, Francesc Perez-Murano

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7130722800

FWCI:

Cites:

Cited by:

Related to: