High Sensitivity Piezoresistive Microsystem With Quad Island Beam Architecture Through Design Curve Fitting and Parametric Analysis for Low‐Pressure Detection
Year: 2026
Type: article
Source: physica status solidi (a)
Institution: Vellore Institute of Technology University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7130929348