On the feasibility of extreme heating rates in SEM using MEMS heater platforms
Year: 2026
Type: article
Abstract: Understanding microstructural evolution under extreme thermal conditions is essential for predicting and controlling metallic microstructures. This work demonstrates the feasibility of employing micro-electro-mechanical system (MEMS) heating platforms for in-situ scanning electron microscopy (SEM) characterization of bulk-like samples during rapid thermal cycling. Using electron backscatter diffraction (EBSD), we tracked the ferrite-to-austenite phase transformation in a pure iron specimen (≈ 100 × 100 × 5 μm) and confirmed that the sample surface temperature closely follows the MEMS temperature setpoint within device accuracy. Under vacuum conditions, stable heating and cooling rates of up to 1000 °C/s were achieved with minimal power input and without compromising EBSD pattern quality. These findings demonstrate that MEMS-based heating in the SEM provides a robust platform for in-situ microstructural characterization across a wide range of applications, including AM-relevant thermal processes, by enabling quantitative studies of thermally activated phenomena such as diffusion, phase transformations, and microstructural evolution under far-from-equilibrium conditions. • Revealing the potential of MEMS-based heating for in-situ characterization of bulk-like specimen. • Calibration of sample surface temperature and heating/cooling rates for bulk-like specimens. • Establishing a platform for investigation of highly dynamic thermal processes in the SEM.
Source: Materials Characterization
Authors: C. Koenig, P. Mayr, J.R. Jinschek, A. Bastos Fanta
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,320
OpenAlex ID: W7133908290