Work

Enhanced thermoelectric performance in a CMOS-MEMS microgenerator using suspended p/n-polysilicon thermocouples

Year: 2026

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/ae4e34

Authors: Ching-Liang Dai, Hung-Wei Chen, Chyan-Chyi Wu, Cheng-Chih Hsu

Institutions: National Chung Hsing University, Powerchip (Taiwan), National United University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W7134118316

FWCI:

Cites: 26

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Related to: 10