Fabry–Perot cascade interferometer for temperature measurement of Si microstructures
Year: 2026
Type: article
Source: Applied Optics
DOI: 10.1364/ao.590792
Institutions: Vrije Universiteit Brussel, IMEC
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7135063261