Work

Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators

Year: 2026

Type: article

Abstract: This work investigates the synergic effect of thermal tuning and mode-coupling on frequency stability in a dual-mode micromechanical resonator. Under dynamic input excitation, the signal in one mode induces the frequency shift of the other mode due to the self-heating and mode-coupling effects. We propose a method to stabilize frequency of the dual-mode resonator under dynamic piezoelectric excitation. The method leverages an on-chip micro-oven to thermally tune the resonator at different temperature coefficients of frequency (TCF) points, enabling the control of self-heating and mode-coupling induced resonant frequency shifts. In our experiment, the resonator is maintained at an appropriately selected TCF point, where the frequency shift caused by mode-coupling can be compensated by the self-heating effect. These findings provide valuable insights into the thermal and nonlinear dynamics of dual-mode resonators and offer a promising strategy for designing high-performance micromechanical resonators in timing and sensing applications.

Source: Microsystems & Nanoengineering

DOI: 10.1038/s41378-026-01210-7

Authors: Yuhao Xiao, Chengliang Sun, Sheng Liu, Guoqiang Wu

Institution: Wuhan University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $3,790

Funders: National Natural Science Foundation of China, Natural Science Foundation of Hubei Province, Wuhan University