Year: 2026
Type: preprint
Abstract: We present a lithographic method for fabricating free-standing microparticles directly from SUEX dry-film epoxy resist. Unlike conventional SU-8 particle fabrication, which requires patterning on solid substrates followed by sacrificial-layer release, our approach eliminates substrate use entirely and produces particles with near 100% yields. The process supports a wide design space of in-plane geometries, including high-aspect-ratio and highly complex shapes. To enable large-scale particle libraries, we integrate the method with the Nazca Python library, allowing programmatic generation of tens of thousands of parametrically defined particle designs. This combination of substrate-free fabrication and automated design provides a scalable route to custom microparticles for materials science, microfluidics, and soft-matter applications.
Source: arXiv (Cornell University)
Authors: Beech, Jason P., Tegenfeldt, Jonas O.
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: Vetenskapsrådet
OpenAlex ID: W7139962292
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