Year: 2026
Type: article
Abstract: Cantilever resonators immersed in liquids experience significant viscous damping, which degrades the resonator's quality factor (Q-factor) and lowers the signal-to-noise ratio. To address this challenge, a strategic perforation approach is proposed to enhance the Q-factor of cantilever resonators in viscous liquids. A distributed-parameter model based on the Rayleigh-Ritz method is developed to quantify the spatial distribution of structural stiffness and viscous damping. The analysis shows that material removal at the free end effectively reduces squeeze-film damping while maintaining stiffness. Resonator prototypes with different perforation designs are fabricated and tested in various viscous liquids. The results show that the free-end perforated cantilever (FPC) achieves a higher Q-factor compared to the conventional non-perforated cantilever (NPC). In an 18.5 mPa·s liquid, the FPC demonstrates a 346.2 % Q-factor enhancement and a 4.78 % frequency increase. These results provide a design guideline for high-performance cantilever resonators in liquid-phase sensing applications.
Source: Micromachines
DOI: 10.3390/mi17030385
Institutions: Jilin University, Sichuan University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,534
OpenAlex ID: W7140080906