Work

UTBB SOI-Structures with Local TR-HR Ultrahigh-Resistance Layers for Radio-Photonic Integrated Circuits

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601080

Authors: V. P. Popov, V. E. Zhilitskii, V. A. Antonov, L. N. Safronov, A. V. Miakonkikh, K. V. Rudenko

Institutions: Institute of Semiconductor Physics, Kurchatov Institute

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140095935

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Cites: 11

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