Temperature Dependence of the Nanostructure Morphology during Sputtering of Silicon by Nitrogen Ions
Year: 2025
Type: article
Source: Russian Microelectronics
Authors: V. K. Smirnov, D. S. Kibalov, A. B. Churilov
Institution: Kurchatov Institute
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7140097198