Work

Optimization of Electrostatic-Assisted Ultrasonic Spray Coating of Photoresist Film

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601948

Authors: V. A. Petukhov, K. A. Tsarik, A. V. Lashkov

Institution: National Research University of Electronic Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140097665

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Cites: 3

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