Reproducibility and Quality of Magnetron Deposition Processes for MoS2 Thin Films
Year: 2025
Type: article
Source: Russian Microelectronics
Authors: M. A. Sharapkov, A. I. Belikov, N. M. Sinyavin
Institution: Bauman Moscow State Technical University
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7140101582