Work

Effect of Piezoelectric Layer on Resonant Frequency of Silicon MEMS Membranes

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601833

Authors: E. Yu. Gusev, S. V. Petrova, L. Jiang, V. S. Klimin, V. V. Polyakov, L. Han, S. Wang, Z. Wang, W. Zhang, O. A. Ageev

Institutions: Southern Federal University, Qilu University of Technology, Shandong Academy of Sciences

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140109289

FWCI:

Cites: 12

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