Work

Imido-Based Non-Ionic Photoacid Generators Targeted for Double Amplification EUV Resists

Year: 2026

Type: article

Source: Chemistry of Materials

DOI: 10.1021/acs.chemmater.5c03282

Authors: Madan Rajendra Biradar, Huseyin Cem Kiliclar, Gokhan Sagdic, Rachel L. Snyder, MingQi Li, Kristen Flajslik, Kenneth Hernandez-Burgos, Kyung Hee Oh, Kwangjin Gu, Jungil Hwang, Christopher Kemper Ober

Institutions: Cornell University, Istanbul Technical University, Qnity Electronics (United States), SK Hynix (South Korea)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: SK Hynix

OpenAlex ID: W7140122518

FWCI: 3.385

Cites: 33

Cited by: 2

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