Change in the Reflection of the a-Si Film on the Surface of Al–4%Cu/Si in the Visible Range during Low-Energy Sputtering in Argon Plasma
Year: 2025
Type: article
Source: Russian Microelectronics
Authors: I. I. Amirov, M. O. Izyumov, O. V. Morozov
Institution: Kurchatov Institute
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7140127927