Work

Fabrication of Structures on SiC Surfaces by Plasma Chemical Etching

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601730

Authors: V. S. Klimin, P. A. Tarasov, M. N. Grigoryev, P. E. Gavrish, A. A. Tkacheva, V. V. Ptashnik, O. A. Ageev

Institutions: Southern Federal University, Taganrog Research Institute of Communications

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140128464

FWCI: 0.228

Cites: 12

Cited by: 1

Related to: