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MEMS As Scientific Instruments: Precise Measurement of the Adhesion Energy with an Adhered Cantilever

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601717

Authors: A. V. Postnikov, I. V. Uvarov, P. S. Schlepakov, V. B. Svetovoy

Institutions: Kurchatov Institute, Russian Academy of Sciences, Frumkin Institute of Physical Chemistry and Electrochemistry Russian Academy of Sciences

Language: English

Topic: Adhesion, Friction, and Surface Interactions

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140135709

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Cites: 37

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