Work

Finite Element Simulation of the MEMS Switch Contact Temperature

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601390

Authors: I. A. Belozerov, I. V. Uvarov

Institution: Kurchatov Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140142977

FWCI:

Cites: 16

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