Work

Increasing Performance of a Microactuator Based on a Hydrogen–Oxygen Mixture Explosion

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725601419

Authors: P. S. Shlepakov, V. B. Svetovoy, I. V. Uvarov

Institutions: Kurchatov Institute, Russian Academy of Sciences, Frumkin Institute of Physical Chemistry and Electrochemistry Russian Academy of Sciences

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140146608

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Cites: 8

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