Work

CIS*FIB**: Development of the coaxial ion source* for integration into a focused ion beam** column

Year: 2025

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Laurencich, Marine, Salançon, E., Houel, Arnaud

Institutions: Tescan (Czechia), Centre National de la Recherche Scientifique, Aix-Marseille Université, Centre Interdisciplinaire de Nanoscience de Marseille

Language: English

Topic: Particle accelerators and beam dynamics

Subfield: Aerospace Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7140154009

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