Work

In-situ tools, sample designs and protocols (D3.2)

Year: 2025

Type: article

Abstract: A new in-situ set-up for thermal cycling of copper on silicon (polyheater) samples has been established at IKTS. An exemplary sample was imaged using X-ray transmission imaging, validating the set-up functionality. New sample layouts for 3D imaging were designed and produced at Infineon Technologies Austria and KAI, but could not yet be imaged due to production delays.

Source: Zenodo (CERN European Organization for Nuclear Research)

DOI: 10.5281/zenodo.19238867

Author: Neumann, Laura

Institution: Fraunhofer Institute for Ceramic Technologies and Systems

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funder: European Commission

Award: Advanced modelling and characterization for power semiconductor materials and technologies