Work

Debris mitigation of a Xe discharge-produced plasma source combined gas jet and Halbach cylinder

Year: 2026

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0318617

Authors: Jiale Zheng, Chenhao Zhou, Guo Yang, Kai Leong Chong, Quan Zhou, Xiao Ling, Jianhua Zhang

Institution: Shanghai University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G602574768, G6152173408, G7699818127, G8482271432

OpenAlex ID: W7141286617

FWCI: 1.766

Cites: 20

Cited by: 1

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