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Molecular Insights into Oxime-Containing Group 4 Transition Metal Precursors for Atomic Layer Deposition

Year: 2026

Type: article

Source: Inorganic Chemistry

DOI: 10.1021/acs.inorgchem.5c04097

Authors: Seungjin Song, Ji Woon Choi, Sung Kwang Lee, Bo Keun Park, Ji Yeon Ryu, Junseong Lee, Taek-Mo Chung

Institutions: Korea Research Institute of Chemical Technology, Korea University of Science and Technology, Chonnam National University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Korea Research Institute of Chemical Technology

Award: G3234489786

OpenAlex ID: W7143830672

FWCI:

Cites: 38

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