Work

Adaptive simulation framework for dynamic shadow mask optimization in physical vapor deposition of optical coatings

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005167

Authors: Bartolome Reyes Ramirez, Claudia Carballo Manuel, Joel Cervantes-Lozano, Miguel Angel Gonzalez Galicia, Svetlana Mansurova, Nikolai Korneev

Institutions: National Institute of Astrophysics, Optics and Electronics, Universidad de Guadalajara, Universidad Nacional Autónoma de México

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7144069170

FWCI:

Cites: 15

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