マイクロgレベルセンシングのための金錘1軸差動容量型mems加速度センサ
Year: 2020
Type: conference-paper
Authors: 内山, 晃宏, Uchiyama, Akihiro, 市川, 崇志, Itikawa, Takasi, 古賀, 達也, Koga, Sayaka, 飯田, 慎一, Iida, Shinichi, 石原, 昇, Ishihara, Noboru, 町田, 克之, Machida, Katsuyuki, 益, 一哉, Masu, Kazuya, 伊藤, 浩之, Ito, Hiroyuki
Language: Japanese
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7145738992
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