Work

Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005267

Authors: Dilan M. Gamachchi, Carson D. Ziemke, Jackson M. Miller, Harrison C. Davison, Wyatt B. Vandendaele, Patricia A. Denn, Bryce D. Stoddard, Carter T. Davidson, Vishvi N. Aurora, David Stalla, Somayeh Saadat Niavol, Andrew C. Meng

Institution: University of Missouri

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: University of Missouri

OpenAlex ID: W7148569813

FWCI:

Cites: 26

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